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Specifications Compatible products
Part
number
Dimensions Thickness Active
area
Squares
width
Photomask
type
Substrate Class Grade Certificate Compatible
telecentric
lenses
(W x H) (Wa x Ha) (Ws) (part number ending in)
(mm x mm) (mm) (mm x mm) (mm) (mm) (mm)
1 1 2
PT004-009 33 x 26 3 15 x 13 0.20 Chrome-on-glass Soda lime glass 1 - No 004, 007, 009
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PT016-024 33 x 26 3 31 x 24 0.60 Chrome-on-glass Soda lime glass 1 - No 016, 024
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PT036-056 66 x 52 3 64 x 51 1.35 Chrome-on-glass Soda lime glass 1 - No 036, 048, 056
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PT064-096 107 x 83 3 105 x 79 2.20 Chrome-on-glass Soda lime glass 1 - No 064, 072, 080, 085, 096
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PT120-144 180 x 140 3 168 x 132 3.00 Chrome-on-glass Soda lime glass 2 - No 110, 120, 130, 144
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PT192-240 300 x 240 3 260 x 200 4.00 Chrome-on-glass Soda lime glass - B No 192, 200, 240
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PT260-310 340 x 280 3 320 x 260 5.00 Chrome-on-glass Soda lime glass - B No 308
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PT004-009-C 33 x 26 3 15 x 13 0.20 Chrome-on-glass Soda lime glass 2 - Yes 004, 007, 009
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PT016-024-C 33 x 26 3 31 x 24 0.60 Chrome-on-glass Soda lime glass 2 - Yes 016, 024
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PT036-056-C 66 x 52 3 64 x 51 1.35 Chrome-on-glass Soda lime glass 2 - Yes 036, 048, 056
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PT064-096-C 107 x 83 3 105 x 79 2.20 Chrome-on-glass Soda lime glass 2 - Yes 064, 072, 080, 085, 096
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PT120-144-C 180 x 140 3 168 x 132 3.00 Chrome-on-glass Soda lime glass 2 - Yes 110, 120, 130, 144
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PT192-240-C 300 x 240 3 260 x 200 4.00 Chrome-on-glass Soda lime glass - B Yes 192, 200, 240
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PT260-310-C 340 x 280 3 320 x 260 5.00 Chrome-on-glass Soda lime glass - B Yes 308
Quote
PT064-096-P 107 x 83 3 105 x 79 2.20 Film-on-glass Soda lime glass - 4 No 064, 072, 080, 085, 096
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PT120-144-P 180 x 140 3 168 x 132 3.00 Film-on-glass Soda lime glass - 4 No 110, 120, 130, 144
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PT192-240-P 300 x 240 3 260 x 200 4.00 Film-on-glass Soda lime glass - 4 No 192, 200, 240
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PT260-310-P 340 x 280 3 320 x 260 5.00 Film-on-glass Soda lime glass - 4 No 308
Quote
PTCP-S1-HR1-C 180 x 140 3 167.4 x 129.6 1.35 Chrome-on-glass Soda lime glass 2 - Yes TCCP12144, TCCP23144, TCCP3MHR144, TCCP5MHR144
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PTCP-M1-LR1-C 245 x 196 3 237.6 x 184.8 2.20 Chrome-on-glass Soda lime glass - B Yes TCCP12192, TCCP23192
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PTCP-M1-HR1-C 245 x 196 3 237.6 x 189.0 1.35 Chrome-on-glass Soda lime glass - B Yes TCCP3MHR192, TCCP5MHR192
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PTCP-L1-LR1-C 300 x 240 3 281.6 x 228.8 2.20 Chrome-on-glass Soda lime glass - B Yes TCCP12260, TCCP23260
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PTCP-L1-HR1-C 300 x 240 3 286.2 x 226.8 1.35 Chrome-on-glass Soda lime glass - B Yes TCCP3MHR260, TCCP5MHR260
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PTCP-S1-HR1-P 180 x 140 3 167.4 x 129.6 1.35 Film-on-glass Soda lime glass - 4 No TCCP12144, TCCP23144, TCCP3MHR144, TCCP5MHR144
Quote
PTCP-M1-LR1-P 245 x 196 3 237.6 x 184.8 2.20 Film-on-glass Soda lime glass - 4 No TCCP12192, TCCP23192
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PTCP-M1-HR1-P 245 x 196 3 237.6 x 189.0 1.35 Film-on-glass Soda lime glass - 4 No TCCP3MHR192, TCCP5MHR192
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PTCP-L1-LR1-P 300 x 240 3 281.6 x 228.8 2.20 Film-on-glass Soda lime glass - 4 No TCCP12260, TCCP23260
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PTCP-L1-HR1-P 300 x 240 3 286.2 x 226.8 1.35 Film-on-glass Soda lime glass - 4 No TCCP3MHR260, TCCP5MHR260
Quote

Last update 28 Sep 2022

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Notes

  1. Class number (2*) for Emulsion-on-glass photomasks differs from usual Chrome-on-glass. Specifications are in the tech info section.
  2. Download CoC Format Pattern facsimile

Technical documents

Product user guide
CoC Format

It’s possible to calculate dimensional tolerance of pattern’s features is calculated as follows:

`Maßtoleranz = ± (A + B * C)`

Example of dimensional tolerance for grade 2 pattern over 10mm length:

Dimensional Tolerance = ± 0.0016mm + (±0.000008mm x 10 mm) = ± 0.00168 mm

For Chrome-on-glass Photomask
ClassMin feature dimensions; Min spacing(µm)Positioning error (µm)Speed factor (µm/mm)
11.46.40.016
20.81.60.008
30.40.60.004
40.20.20.001
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For Film-on-glass Photomask
GradeMin feature dimensions; Min spacing(µm)Positioning error (µm)Speed factor (µm/mm)
19.69.60.015
24.89.60.015
32.49.60.015
41.29.60.015
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